1、 Cutting of precision parts
It mainly includes precision turning, mirror grinding and grinding. Micro turning is carried out on a precision lathe with finely ground single crystal diamond turning tool. The cutting thickness is only about 1 micron. It is usually used to process high-precision and smooth surface parts, such as spherical mirror, aspheric mirror and plane mirror of non-ferrous metal materials.
2、 Precision parts processing
When the machining accuracy of precision parts is nanometer or even atomic units (the distance of atomic lattice is 0.1-0.2 nm), the machining method of ultra precision parts cannot adapt. The processing method of special precision parts, i.e. chemical energy, electrochemical energy, thermal energy or electric energy, must be adopted to make these energies exceed the binding energy between atoms, so as to eliminate the adhesion, binding or lattice deformation of some atoms on the surface of the workpiece, so as to achieve the purpose of ultra precision processing. This process includes mechanical chemical polishing, ion sputtering and ion implantation, electron beam exposure, laser beam processing, metal evaporation and molecular beam epitaxy.